Semiconductor Grade 99.9995% High Purity Quartz Flange/Ring for Etching (PQ871E/PQ811E)

Basic Info.

Model NO.	PQ871E/PQ811E
Use for	Quartz Flange
Transport Package	Wooden Case, Carton Box
Specification	customerized
Trademark	PQ
Origin	China
Production Capacity	100/Day

Packaging & Delivery

Package Size 100.00cm * 100.00cm * 74.00cm Package Gross Weight 50.000kg

Product Description

Application
Semiconductor grade quartz cylinder is used as the
base material of quartz ring in semiconductor etching
process.

Characteristics
Semiconductor grade quartz cylinder features high purity, micro bubble free, low hydroxyl, etc.Specifications

OD Range	ID Range
300-350	210-240
350-400	240-300
400-450	330-350

Physicochemical properties
i.Trace elements Unit:ppm

Code	Criteria	Al	Ca	Cr	Cu	Fe	K	Li	Mg	Mn	Na	Ti	Zr
PQ100E	Typical	13	0.5	<0.05	<0.05	0.1	0.1	0.3	0.05	0.05	0.1	1.3	1
	Maximum	19	1	0.1	0.1	0.5	1	1	0.2	0.2	1	2	2
PQ100EH	Typical	8	0.6	<0.05	<0.01	0.1	0.1	0.2	0.05	0.05	0.1	1.3	1
	Maximum	10	1	0.1	<0.01	0.5	0.5	0.5	0.2	0.2	0.5	2	2

ii. OH Content

PQ100E/ PQ100EH

OH<110ppm

iii. Physical Properties

Item	Index
Density(g/cm3)	2.2
Heat Conductivity(w/m·k,1000ºC)	2.28
Coefficient of Thermal Expansion(ºC-1,1000ºC)	5.5×10-7
Softening Point(ºC)	1670
Annealing Point(ºC)	1210
Strain Point(ºC)	1110

1. TEL, LAM,AMAT certified products
2. Word leading brand;
3. Own of important National patents and core technologies;
4. Purity of SiO2 can reach to 99.995-99.999%
5. Full product range: lighting, solar, optics, optical fiber, semiconductor and etc.
6. Cutting edge of melting technology

FAQ:
Q1. How can I get a sample to check your quality?
After price confirmation, you can require for samples to check our quality.
Q2. Which payment form you can accept?
A: T/T
Q3. Can I request to advance the shipment?
A: We can discuss with other customers and try to move up earlier.
Q4. Which shipping way can you provide?
A: We can provide shipping by sea, by air and by express.
Q5: What's your after-sale service?
A: Our quality warranty period is one year. Any quality problem will be solved to customer satisfactions.